Perkin Elmer Parts and Services
System
Rebuilding
System Upgrades
- Table Feedthru
- RF Generator (tuning network)
- Computer System
- Precision Table Drive
- Cryo-Regeneration Controller
- Turbo Pumped Load Lock
- Chamber Roughing Valves
- Load Lock Roughing Valves
- Chamber Hi-Vac Valve
- Chamber Throttle Valve Conversion
- Delta to 8'' Adapter
- Load Lock Heaters
- Delta Heater Assembly
- 8'' Heater Assembly
Component Repair
- Table Assembly
- Table Feedthru
- Delta Cathode Backing Plates
- Delta Anode Rings
- 8'' DC Magnetron Backing Plate
- 8'' RF Backing Plate
- J Arm Rebuild
- L Arm Rebuild
Components
- Insulators
- Shield Sets
- Load Lock Controller
- Pump Down Controller
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