Edwards DryStar

  • Has a model EH500A roots pump hydro-kinetic drive will start at atmosphere
  • Fore pump is a dp 80 dry pump
  • Inlet flange ISO 100
  • Pumping speed at inlet 300 cfm
  • Requires cooling water and nitrogen
  • Power requirement 208 VAC, 3 PHASE, 30 AMP
  • Total dry system can be used for semiconductor processes
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