High Tech
Services repairs and manufactures all styles of Varian
pressure plates used in four, five, and six inch sputtering
machines. The repairs may be as simple as fixing a leaking
line or broken screw or it may involve a complete rebuild.
A rebuild of the pressure plate includes cleaning of the main
wheel, replacing of copper plates and water line assemblies,
and the replacement of the outer pads. After the main repairs
are made the assembly is helium leak tested to 2x10-9
SCCM, cleaned and double bagged in Nitrogen. High Tech Services
Inc. can also provide a new pressure plate assembly.
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