HIGH
TECH SERVICES repairs and rebuilds Applied Materials
heated chuck assemblies. We offer several repair options to
choose from including reface of the chuck, bellows replacement,
or a complete rebuild. The complete rebuild includes new heaters
and wiring, new thermocouples, replacement of bellows, re-tap
screws, resurface faceplate and replacement of water lines and
fittings. After the chuck is rebuilt we helium leak check the
finished chuck to 1x10-9 SCCM and then have the chuck cleaned
and packaged for shipment.
